CF4 Gas
CF4 Gas
Carbon Tetrafluoride (CF₄), also known as Tetrafluoromethane, is a colorless, odorless, non-flammable and chemically stable gas. It is widely used in semiconductor manufacturing, plasma etching, electronics, laboratory research and specialty gas applications. CF₄ provides consistent performance in processes requiring a fluorine-containing plasma and controlled gas composition.
Technical Specifications
| Parameter | Specification |
|---|---|
| Gas Name | Carbon Tetrafluoride |
| Common Name | Tetrafluoromethane |
| Chemical Formula | CF₄ |
| CAS Number | 75-73-0 |
| Molecular Weight | 88.00 g/mol |
| Appearance | Colorless Gas |
| Odor | Odorless |
| Nature | Non-Flammable / Chemically Stable |
| Boiling Point | Approx. -127.8°C |
| Melting Point | Approx. -183.6°C |
| Supply Form | Compressed Gas |
| Packaging | High-Pressure Cylinders / Specialized Containers |
Key Features
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High Purity: Available in specialty and high-purity grades for precision applications.
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Chemically Stable: Provides excellent stability under normal storage and handling conditions.
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Excellent Plasma Gas: Provides fluorine-based plasma chemistry for controlled etching processes.
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Non-Flammable: Does not support combustion and is suitable for controlled industrial processes.
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Consistent Composition: Controlled purity and composition support repeatable semiconductor and electronics processes.
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Specialty Gas Supply: Available in suitable cylinders and customized gas mixtures according to application requirements.
Applications
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Semiconductor Manufacturing: Widely used in plasma etching and semiconductor fabrication processes.
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Plasma Etching: Used to create controlled fluorine plasma for etching silicon-based materials.
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Electronics Industry: Used in specialized manufacturing processes for electronic and microelectronic components.
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Thin-Film Processing: Used in selected plasma-based deposition and surface-processing applications.
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Solar Cell Manufacturing: Used in selected plasma etching and surface-treatment processes.
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Research & Development: Used in controlled plasma, materials science and semiconductor research.
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Specialty Gas Mixtures: Used as a component in customized gas mixtures for semiconductor and analytical applications.
Why Choose Our CF4 Gas?
We supply CF₄ Gas for semiconductor, electronics, plasma processing, solar cell, laboratory and specialty gas applications. Our Carbon Tetrafluoride solutions are available according to required purity, packaging and application requirements, providing consistent gas quality and reliable performance for precision processes.